0190-15552W / / GEN RF 13.56MHZ 10KW AE APEX REV J / /
配送 Ship within 5 DAYS after payment received
保証 30 DAYS after shipped
状態 OEM: Used Refurbished by manufacturer
1 個あります
おすすめ
- プロセスCVD
- ウエハサイズ12inch(300mm)
- 配送サービスFirst class service (1 to 3 business days)
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- 商品詳細:
- The versatile Apex family of RF generators provides remarkably high power densityand power-delivery consistency. Sophisticated RF conversion technology not onlyoffers enhanced product and process reliability but also increases cost effectivenessby eliminating the need for front-end, DC-to-DC conversion components.Exceptionally fast and sensitive arc-handling technology also increases yield andlowers CoO. For superb performance in plasma-based, thin-film processes forsemiconductor, flat panel display, or data storage manufacturing, the Apex platformis the ideal choice. With its unique, modular design-in a package so trim it can bemounted directly on the chamber-the Apex platform is also highly customizableto suit your specific process needs.
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