0190-15552W / / GEN RF 13.56MHZ 10KW AE APEX REV J / /

0190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_010190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_02
0190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_01
0190-15552W//GEN RF 13.56MHZ 10KW AE APEX REV J//_02

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Warranty 30 DAYS after shipped

Condition OEM: Used Refurbished by manufacturer

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  • Process
    CVD
  • Wafer size
    12inch(300mm)
  • Delivery Service
    First class service (1 to 3 business days)
  • Payment method
    PayPal Bank Transfer
Item description:
The versatile Apex family of RF generators provides remarkably high power densityand power-delivery consistency. Sophisticated RF conversion technology not onlyoffers enhanced product and process reliability but also increases cost effectivenessby eliminating the need for front-end, DC-to-DC conversion components.Exceptionally fast and sensitive arc-handling technology also increases yield andlowers CoO. For superb performance in plasma-based, thin-film processes forsemiconductor, flat panel display, or data storage manufacturing, the Apex platformis the ideal choice. With its unique, modular design-in a package so trim it can bemounted directly on the chamber-the Apex platform is also highly customizableto suit your specific process needs.
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